Shenzhen Carst Technology Co., Ltd.
Shenzhen Carst Technology Co., Ltd.
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Drum conveyor line
Ultra-Clean Roller Conveyor System for Semiconductor Manufacturing
Designed for Class 1-100 cleanroom environments, our contamination-free roller conveyor ensures particle-free wafer and chip handling throughout semiconductor production. This high-precision system meets SEMI F72 and ISO 14644-1 standards for front-end and back-end processes.
Critical Performance Features:
<0.1μm Particle Emission - Certified for photolithography and etching areas
Ceramic-Coated Rollers - Non-metallic, non-outgassing surface
Laminar Airflow Integration - Maintains cleanzone integrity
Vibration Control - <0.05μm amplitude for nanoscale alignment
Production Advantages:
Eliminates 99.99% contamination risks
30% higher yield in sensitive processes
Modular design for fab tool integration
Ideal for 300mm wafer fabs, MEMS production, and advanced packaging. Optional AMC filtration and RFID tracking available.
Upgrade your cleanroom material handling - Contact our semiconductor specialists today!
Product parameters
| Frame material | Aluminum/lron/Lean Pipe | Accept customization |
| Belt width | General:200-1000MM | Accept customization |
| Worktabl Height | General:500-1200MM | Accept customization |
| Transportation speed | General:0-12M/MIN | |
| Accessories brand | Famous Chinese brands | Accept customization |
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